C-V Profiling of Ultrashallow Junctions using a Step-Like Background Doping Profile
Conference Paper
(2009)
Author(s)
M Popadic (TU Delft - Electronic Components, Technology and Materials)
C Xu (External organisation)
F Sarubbi (TU Delft - Electronic Components, Technology and Materials)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:d859d6bd-7869-45f7-b223-ebedef113589
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Publication Year
2009
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
303-306
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