Nanolithography in an environmental scanning transmission electron microscope
Conference Paper
(2005)
Author(s)
WF van Dorp (TU Delft - ImPhys/Charged Particle Optics)
Kees Hagen (TU Delft - ImPhys/Charged Particle Optics)
P.A. A. Crozier (External organisation)
B van Someren (TU Delft - ImPhys/Charged Particle Optics)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
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https://resolver.tudelft.nl/uuid:d900fbd0-51e2-4af1-ae59-04ef0e0dc70b
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Publication Year
2005
Research Group
ImPhys/Charged Particle Optics
Pages (from-to)
98-99
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