Microhotplates with TiN heaters
Journal Article
(2008)
Author(s)
Fredrik Creemer (TU Delft - Old - EWI Sect. ECTM)
D Briand (External organisation)
Henny W. Zandbergen (QN/High Resolution Electron Microscopy)
W. van der Vlist (TU Delft - Electronic Components, Technology and Materials)
CR de Boer (TU Delft - Electronic Components, Technology and Materials)
NF de Rooij (External organisation)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Old - EWI Sect. ECTM
To reference this document use:
https://resolver.tudelft.nl/uuid:db1d11ed-9071-430a-b91d-d6bc32a660de
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Publication Year
2008
Research Group
Old - EWI Sect. ECTM
Volume number
148
Pages (from-to)
416-421
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