Statistical variation analysis of sub-5 nanometer sized electron beam induced depositis

Journal article (2006)

Authors

W.F. van Dorp ImPhys/Charged Particle Optics
B van Someren ImPhys/Charged Particle Optics
C.W. Hagen ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
P. A. Crozier External organisation
Research Group
ImPhys/Charged Particle Optics
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Published Date

2006

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics