The uniformity of APCVD SiGe layers with high Ge concentration
Conference Paper
(1998)
Author(s)
J. Shi (External organisation)
K Grimm (External organisation)
Lis Nanver (TU Delft - Electronic Components, Technology and Materials)
C.C.G. Visser (TU Delft - Electronic Components, Technology and Materials)
A van den Boogaard (External organisation)
Research Group
Electronic Components, Technology and Materials
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Publication Year
1998
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
-
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