Passive photonic alignment with submicrometer repeatability and accuracy
Journal Article
(2013)
Author(s)
J.F.C. van Gurp (TU Delft - Micro and Nano Engineering)
M Tichem (TU Delft - Micro and Nano Engineering)
U. Staufer (TU Delft - Micro and Nano Engineering)
J Zhao (External organisation)
Research Group
Micro and Nano Engineering
DOI related publication
https://doi.org/10.1109/TCPMT.2013.2272419
To reference this document use:
https://resolver.tudelft.nl/uuid:dd257d5a-3896-4cb7-9439-a71bc8ff6600
More Info
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Publication Year
2013
Language
English
Research Group
Micro and Nano Engineering
Bibliographical Note
harvest@en
Issue number
11
Volume number
3
Pages (from-to)
1971-1979
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