Uniform illumination in SCALPEL by imaging the angular distribution.
Conference Paper
(1999)
Author(s)
D Moonen (TU Delft - ImPhys/Charged Particle Optics)
MD Nijkerk (TU Delft - ImPhys/Charged Particle Optics)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
WK Waskiewicz (External organisation)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:dd6f7a13-63f6-411c-8071-b09058bb7bf5
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Publication Year
1999
Research Group
ImPhys/Charged Particle Optics
Pages (from-to)
7-14
ISBN (print)
0-8194-3263-6
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