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WK Waskiewicz
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Authored
2 records found
Investigation of illumination non-uniformities from an electron gun for projection electron-beam lithography.
Conference paper -
D Moonen
,
MD Nijkerk
,
P. Kruit
,
WK Waskiewicz
Uniform illumination in SCALPEL by imaging the angular distribution.
Conference paper -
D Moonen
,
MD Nijkerk
,
P. Kruit
,
WK Waskiewicz