Investigation of illumination non-uniformities from an electron gun for projection electron-beam lithography.

Conference paper (1999)

Authors

D Moonen ImPhys/Charged Particle Optics
MD Nijkerk ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
WK Waskiewicz External organisation
Research Group
ImPhys/Charged Particle Optics
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Published Date

1999

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics