Bulk Acoustic Wave Based Mocrfluidic Particle Sorting with Capacitive Micromachined Ultrasonic Transducers

Conference paper (2022)

Authors

S. Kawasaki Electronic Components, Technology and Materials - EEMCS
Jia-Jun Yeh Student
M. Saccher Electronic Components, Technology and Materials - EEMCS
Jian Li Student
R. Dekker Philips Research
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Copyright: © 2022 S. Kawasaki, Jia-Jun Yeh, M. Saccher, Jian Li, R. Dekker
DOI
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https://doi.org/10.1109/MEMS51670.2022.9699807
CMUT Microfluidic particle sorting Acoustic particle sorting Bulk acoustic wave
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Published Date

2022

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

The main limitation of acoustic particle separation for microfluidic application is its low sorting efficiency. This is due to the weak coupling of surface acoustic waves (SAWs) into the microchannel. In this work, we demonstrate bulk acoustic wave (BAW) particle sorting using capacitive micromachined ultrasonic transducers (CMUTs) for the first time. A collapsed mode CMUT was driven in air to generate acoustic pressure within the silicon substrate in the in-plane direction of the silicon die. This acoustic pressure was coupled into a water droplet, positioned at the side of the CMUT die, and measured with an optical hydrophone. By using a beam steering approach, the ultrasound generated from 32 CMUT elements were added in-phase to generate a maximum peak-to-peak pressure of 0.9 MPa. Using this pressure, 10 µm latex beads were sorted almost instantaneously.