A simple model describing the kinetic of CVD deposition of pure-boron layers from diborane
Conference Paper
(2013)
Authors
V Mohammadi (TU Delft - Electronic Components, Technology and Materials)
WB de Boer (Old - EWI Sect. ECTM)
T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://doi.org/10.1149/04531.0057ecst
TU Delft Repository resolver:
https://resolver.tudelft.nl/e29c2cce-7364-4e9b-9874-ab197abf3d51
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Publication Year
2013
Research Group
Electronic Components, Technology and Materials
Bibliographical Note
Harvest@en
Pages (from-to)
57-65
ISBN (print)
978-1-62332-054-6
DOI:
https://doi.org/10.1149/04531.0057ecst
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