Fabrication and characterization of MEMS airgap-based optical filters for the UV spectral range

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Fabrication and characterization of MEMS airgap-based optical filters for the UV spectral range

Conference Paper (2017)

Author(s)

M. Ghaderi (TU Delft - Electrical Engineering, Mathematics and Computer Science)

R. F. Wolffenbuttel (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Research Group

Electronic Instrumentation

Optical characterization Reflectance Silicon technology Spectral reflectance Reflectivity Reflectivity Silicon compounds Optical filters Micromechanical devices Optical device fabrication Optical variables control Optical MEMS Optical reflection Fill-factor Optical filters MEMS airgap-based optical filters Airgap Bragg reflectors Membrane materials Nitride layers Silicon oxide layers Ultraviolet spectral range Optical refraction Airgap optical filters Distributed Bragg reflector Optical bandwidth UV filters UV spectral range

DOI related publication

https://doi.org/10.1109/TRANSDUCERS.2017.7994453 Final published version

To reference this document use

https://resolver.tudelft.nl/uuid:e2f69242-70e0-44fe-b45c-1697fa5008e3

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Publication Year

2017

Language

English

Research Group

Electronic Instrumentation

Pages (from-to)

1959-1962

ISBN (print)

978-1-5386-2732-7

ISBN (electronic)

978-1-5386-2731-0

Event

Transducers 2017 (2017-06-18 - 2017-06-22), Kaohsiung, Taiwan

Downloads counter

120

Abstract

This paper presents the design, fabrication, and characterization of MEMS airgap-based optical filters designed for the ultraviolet (UV) spectral range. Optical design, process conditions, and material choice have been optimized for obtaining large-area and optically flat membranes. Several distributed Bragg reflectors centered at λ=400 nm were designed using silicon oxide and nitride layers as the membrane materials. Airgap Bragg reflectors with up to 80% fill-factor were fabricated in standard Si technology and the spectral reflectance of the reflectors were compared. The optical characterization demonstrated a high reflectance (up to 80%) with only a few number of layers over a bandwidth of up to 175 nm in the UV spectral range.