A Piezo-driven TEM-stage with subnanometer position stability
Conference Paper
(1996)
Author(s)
BM Mertens (TU Delft - ImPhys/Charged Particle Optics)
H van der Wulp (External organisation)
HF van Beek (External organisation)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:e35ca3fd-278c-4926-8aa7-98f431b4befa
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Publication Year
1996
Language
English
Research Group
ImPhys/Charged Particle Optics
Bibliographical Note
ISSN 1381-1371@en
Pages (from-to)
146-147
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