A Piezo-driven TEM-stage with subnanometer position stability

Conference paper (1996)

Authors

BM Mertens ImPhys/Charged Particle Optics
H van der Wulp External organisation
HF van Beek External organisation
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
More Info
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Published Date

1996

Language

English

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Research Group

ImPhys/Charged Particle Optics