A Piezo-driven TEM-stage with subnanometer position stability

Conference Paper (1996)
Author(s)

BM Mertens (TU Delft - ImPhys/Charged Particle Optics)

H van der Wulp (External organisation)

HF van Beek (External organisation)

Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)

Research Group
ImPhys/Charged Particle Optics
More Info
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Publication Year
1996
Language
English
Research Group
ImPhys/Charged Particle Optics
Bibliographical Note
ISSN 1381-1371@en
Pages (from-to)
146-147

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