Temporal and spatial reactors for atomic layer deposition on particles

Abstract (2014)

Authors

J.R. van Ommen ChemE/Product and Process Engineering - AS
F. Grillo ChemE/Product and Process Engineering - AS
D. Valdesueiro Gonzalez ChemE/Product and Process Engineering - AS
DJ Kooijman External organisation
M. Talebi ChemE/O&O groep - AS , ChemE/Product and Process Engineering - AS
A. Goulas ChemE/Product and Process Engineering - AS
Research Group
ChemE/Product and Process Engineering (AS) (TU Delft)
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Published Date

2014

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

ChemE/Chemical Engineering

Research Group

ChemE/Product and Process Engineering