Role of atomic layer deposited aluminum oxide as oxidation barrier for silicon based materials

Journal article (2015)

Authors

G. Fiorentino Electronic Components, Technology and Materials - EEMCS
B. Morana Electronic Components, Technology and Materials - EEMCS
S Forte External organisation
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2015

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials