Role of atomic layer deposited aluminum oxide as oxidation barrier for silicon based materials

Fiorentino, G.; Morana, Bruno; Forte, S; Sarro, P. M.

Role of atomic layer deposited aluminum oxide as oxidation barrier for silicon based materials

Journal article (2015)

Authors

G. Fiorentino Electronic Components, Technology and Materials

Bruno Morana Electronic Components, Technology and Materials

S Forte External organisation

P. M. Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2015

Language

English

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Research Group

Electronic Components, Technology and Materials

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