The growth of carbon nanotubes on electrically conductive ZrN support layers for through-silicon vias

Journal article (2016)

Authors

S. Vollebregt Electronic Components, Technology and Materials - EEMCS
S Banerjee External organisation
F.D. Tichelaar QN/High Resolution Electron Microscopy
R. Ishihara Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2016

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials