The growth of carbon nanotubes on electrically conductive ZrN support layers for through-silicon vias
Journal Article
(2016)
Author(s)
S Vollebregt (TU Delft - Electronic Components, Technology and Materials)
S. Banerjee (External organisation)
F.D. Tichelaar (QN/High Resolution Electron Microscopy)
R Ishihara (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.mee.2016.01.034
To reference this document use:
https://resolver.tudelft.nl/uuid:e81de7fc-a3b6-4f14-8f01-7e38ef3d34f7
More Info
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Publication Year
2016
Language
English
Research Group
Electronic Components, Technology and Materials
Volume number
156
Pages (from-to)
126-130
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