Simulation of selective tungsten chemical vapour deposition (a section of Solid State Electronics)
Journal Article
(1998)
Author(s)
KJ Kuijlaars (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
C. R. Kleijn (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
Harry EA van den Akker (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
Research Group
Old - sect Kramers Laboratory (MSP/FT)
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Publication Year
1998
Research Group
Old - sect Kramers Laboratory (MSP/FT)
Volume number
1
Pages (from-to)
43-54
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