Induced coupled plasma deep reactive ion etching based sensors
Conference Paper
(2005)
Author(s)
Grégory Pandraud (TU Delft - Electronic Instrumentation)
DHB Wicaksono (TU Delft - Electronic Instrumentation)
LB Hebrard (TU Delft - Electronic Instrumentation)
Aurèle J.L. Adam (TU Delft - ImPhys/Optics)
Pim J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:ea0230c6-abd5-4adc-907a-d590a48d2067
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Publication Year
2005
Research Group
Electronic Instrumentation
Bibliographical Note
Editor onbekend JH@en
Pages (from-to)
68-71
ISBN (print)
91-631-7553-3
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