High speed, dry etching of Fe for integration of magnetic devices in microelectronics.
Journal Article
(2001)
Author(s)
MSP Andriesse (TU Delft - QN/Kavli Nanolab Delft)
EWJM van der Drift (TU Delft - QN/Kavli Nanolab Delft)
W. G. Sloof (TU Delft - OLD Virtual Materials and Mechanics)
Research Group
QN/Kavli Nanolab Delft
To reference this document use:
https://resolver.tudelft.nl/uuid:ea12c454-b713-4657-8cbd-07d6e2ced1dc
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Publication Year
2001
Research Group
QN/Kavli Nanolab Delft
Volume number
19
Pages (from-to)
2901-2905
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