A miniaturized optical gas-composition sensor with integrated sample chamber

Journal article (2016)

Authors

N.P. Ayerden Electronic Instrumentation -

M. Ghaderi Electronic Instrumentation -

Peter Enoksson Chalmers University of Technology

G. de Graaf Electronic Instrumentation -

R.F. Wolffenbuttel Electronic Instrumentation -

Research Group

Electronic Instrumentation () (TU Delft)

Gas sensor Fabry-Perot interferometer Methane Mid-IR Linear variable optical filter

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http://resolver.tudelft.nl/uuid:eaa9703f-44a4-4556-ac01-0c07597c8366

Published Date

19-03-2016

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation

Abstract

A robust and highly miniaturized optical gas sensor based on optical absorption spectroscopy is presented. By using the resonator cavity of a linear variable optical filter (LVOF) also as a gas chamber, a compact and robust optical sensor is achieved. The device operates at the 15th order in 3.2–3.4 μm wavelength range for distinguishing hydrocarbons. The physical cavity length at the μm-level is translated into an effective optical absorption path length at the mm-level by the use of highly reflective (R > 98%) Bragg mirrors. The optical design using the Fizeau interferometer approach is described. Moreover, the CMOS-compatible fabrication method is explained. In addition to the wideband and single wavelength filter characterization, absorption of methane in the LVOF cavity is demonstrated at 3392 nm and 3416.60 nm wavelengths.