Crystallographic silicon-etching for ultra-high aspect-ratio FinFET

Jovanovi¿, V; Suligoj, T; Nanver, LK

Crystallographic silicon-etching for ultra-high aspect-ratio FinFET

Conference paper (2008)

Authors

V Jovanovi¿ External organisation

T Suligoj External organisation

LK Nanver Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2008

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Research Group

Electronic Components, Technology and Materials

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