Design and construction of a high resolution 3D translation stage for metrological applications

Journal article (1998)

Authors

KR Koops External organisation
R Banning Old - sect Systems, Signals and control Group (IST/MMR)
PMLO Scholte Old organisation TN/TechnischeNatuurkunde voorm
WC Heerens ImPhys/Charged Particle Optics
JMTA Adriaens External organisation
W.L. de Koning Discrete Mathematics and Optimization - EEMCS
Research Group
Old - sect Systems, Signals and control Group (IST/MMR)
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Published Date

1998

Language

Undefined/Unknown

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Research Group

Old - sect Systems, Signals and control Group (IST/MMR)