Design and construction of a high resolution 3D translation stage for metrological applications

Journal Article (1998)
Author(s)

KR Koops (External organisation)

R Banning (TU Delft - Old - sect Systems, Signals and control Group (IST/MMR))

PMLO Scholte (TU Delft - Old organisation TN/TechnischeNatuurkunde voorm)

WC Heerens (TU Delft - ImPhys/Charged Particle Optics)

JMTA Adriaens (External organisation)

Willem L. de Koning (TU Delft - Discrete Mathematics and Optimization)

Research Group
Old - sect Systems, Signals and control Group (IST/MMR)
More Info
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Publication Year
1998
Research Group
Old - sect Systems, Signals and control Group (IST/MMR)
Volume number
66
Pages (from-to)
S857-S860

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