Design and construction of a high resolution 3D translation stage for metrological applications
Journal Article
(1998)
Author(s)
KR Koops (External organisation)
R Banning (TU Delft - Old - sect Systems, Signals and control Group (IST/MMR))
PMLO Scholte (TU Delft - Old organisation TN/TechnischeNatuurkunde voorm)
WC Heerens (TU Delft - ImPhys/Charged Particle Optics)
JMTA Adriaens (External organisation)
Willem L. de Koning (TU Delft - Discrete Mathematics and Optimization)
Research Group
Old - sect Systems, Signals and control Group (IST/MMR)
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Publication Year
1998
Research Group
Old - sect Systems, Signals and control Group (IST/MMR)
Volume number
66
Pages (from-to)
S857-S860
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