A surface micromachined thermopile detector array with an interference-based absorber
Journal Article
(2011)
Author(s)
HW Wu (TU Delft - Electronic Instrumentation)
A. Emadi (TU Delft - Electronic Instrumentation)
Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Ger De Graaf (TU Delft - Electronic Instrumentation)
R.F. Wolfenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1088/0960-1317/21/7/074009
To reference this document use:
https://resolver.tudelft.nl/uuid:ebbd62c8-d29e-46af-8874-465c02ecb5d3
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Publication Year
2011
Language
English
Research Group
Electronic Instrumentation
Issue number
7
Volume number
21
Pages (from-to)
1-8
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