Mechanical characterization and modeling of low-dielectric-constant SiLK films using nano-indentation: time- and temperature-effects
Conference Paper
(2003)
Author(s)
Jaap Toonder (External organisation)
A van Dijken (External organisation)
V Gonda (TU Delft - Dynamics of Micro and Nano Systems)
J Beijer (External organisation)
K Zhang (External organisation)
L.J. Ernst (TU Delft - Dynamics of Micro and Nano Systems)
Research Group
Dynamics of Micro and Nano Systems
To reference this document use:
https://resolver.tudelft.nl/uuid:ec14f0ee-422f-4ff0-b7e0-e672c3df7efd
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Publication Year
2003
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
708-713
ISBN (print)
0-7803-7991-5
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