Accurate read-out calibration of an SOI capacitive transducer using the pull-in voltage
Conference Paper
(2007)
Author(s)
L Mol (TU Delft - Electronic Instrumentation)
LA Rocha (TU Delft - Electronic Instrumentation)
E Cretu (External organisation)
RF Wolffenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:ec87383b-82ef-4ed8-9d77-4d89a2facee4
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Publication Year
2007
Research Group
Electronic Instrumentation
Pages (from-to)
355-358
ISBN (print)
978 972 98603 3 1
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