Accurate read-out calibration of an SOI capacitive transducer using the pull-in voltage

Conference Paper (2007)
Author(s)

L Mol (TU Delft - Electronic Instrumentation)

LA Rocha (TU Delft - Electronic Instrumentation)

E Cretu (External organisation)

RF Wolffenbuttel (TU Delft - Electronic Instrumentation)

Research Group
Electronic Instrumentation
More Info
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Publication Year
2007
Research Group
Electronic Instrumentation
Pages (from-to)
355-358
ISBN (print)
978 972 98603 3 1

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