Compensating commutation-angle domain disturbances with application to waveform optimization for piezo stepper actuators
Leontine Aarnoudse (Eindhoven University of Technology)
Nard Strijbosch (IBS Precision Engineering)
Paul Tacx (Eindhoven University of Technology)
Edwin Verschueren (Thermo Fisher Scientific)
Tom Oomen (TU Delft - Mechanical Engineering, Eindhoven University of Technology)
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Abstract
Piezo stepper actuators are very promising for nanopositioning systems due to their high resolution, high stiffness, fast response, and the ability to position a mover over an infinite stroke by means of motion reminiscent of walking. The aim of this paper is to enhance the waveforms for actuating piezo steppers, by actively compensating for repetitive disturbances that are introduced by the walking behavior. A compensation method is developed to compensate for disturbances in the stepping domain, since disturbances may vary in the time domain if the velocity changes. The results from this procedure are exploited to determine an optimal waveform for the working range of the actuator. A significant improvement in performance is achieved after applying this waveform to a piezo stepper actuator.
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