Fabrication of in situ ultrathin anodic aluminum oxide layers for nanostructuring on silicon substrate
Journal Article
(2007)
Author(s)
B Yan (TU Delft - Electronic Components, Technology and Materials)
TMH Pham (TU Delft - Electronic Components, Technology and Materials)
Y. Ma (External organisation)
Y Zhuang (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:ede71a4b-4dd7-4ad1-9491-fc84e145ad92
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Publication Year
2007
Research Group
Electronic Components, Technology and Materials
Volume number
91
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