Solutions to a proxomity effect in high resolution electron beam induced deposition
Journal Article
(2007)
Author(s)
W.F. van Dorp (TU Delft - ImPhys/Charged Particle Optics)
S Lazar (QN/High Resolution Electron Microscopy)
CW Hagen (TU Delft - ImPhys/Charged Particle Optics)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:ee422cc1-1c00-4952-ac0a-19f14e30b1be
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Publication Year
2007
Research Group
ImPhys/Charged Particle Optics
Issue number
5
Volume number
25
Pages (from-to)
1603-1608
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