Resonance frequency behavior of silicon nitride cantilevers as a function of pressure in different gas environments
Conference Paper
(2009)
Author(s)
K Babaei Gavan (TU Delft - QN/Mol. Electronics & Devices)
J van der Heijden (External organisation)
EWJM van der Drift (TU Delft - QN/Kavli Nanolab Delft)
H.S.J. Zant (TU Delft - QN/Mol. Electronics & Devices)
Research Group
QN/Mol. Electronics & Devices
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https://resolver.tudelft.nl/uuid:ef2503a0-8a6c-4ca0-a15b-41158fdc1f66
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Publication Year
2009
Language
English
Research Group
QN/Mol. Electronics & Devices
Bibliographical Note
niet eerder opgevoerd@en
Pages (from-to)
1837-1840
ISBN (print)
978-142444548-6
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