Resonance frequency behavior of silicon nitride cantilevers as a function of pressure in different gas environments

Conference paper (2009)

Authors

K Babaei Gavan QN/Mol. Electronics & Devices
J van der Heijden External organisation
E.W.J.M. van der Drift QN/Kavli Nanolab Delft - AS
H.S.J. van der Zant QN/Mol. Electronics & Devices
Research Group
QN/Mol. Electronics & Devices
More Info
expand_more

Published Date

2009

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

QN/Mol. Electronics & Devices