Exploring the benefits of MEMS for micro assembly tasks
Journal Article
(2004)
Author(s)
VA Henneken (TU Delft - Micro and Nano Engineering)
M. Tichem (TU Delft - Micro and Nano Engineering)
B Karpuschewski (TU Delft - Micro and Nano Engineering)
Research Group
Micro and Nano Engineering
To reference this document use:
https://resolver.tudelft.nl/uuid:f073913f-7e51-46cc-9388-4cf032372aed
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Publication Year
2004
Research Group
Micro and Nano Engineering
Issue number
4
Volume number
24
Pages (from-to)
416-421
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