Assessment of testing methodologies for thin-film vacuum MEMS packages
Journal Article
(2008)
Author(s)
Q. Li (TU Delft - Computational Design and Mechanics)
Johannes Goosen (TU Delft - Computational Design and Mechanics)
Fred van Van Keulen (TU Delft - Computational Design and Mechanics)
JTM van Beek (External organisation)
Guo-Qi Zhang (TU Delft - Dynamics of Micro and Nano Systems)
Research Group
Computational Design and Mechanics
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https://resolver.tudelft.nl/uuid:f133a6da-9b3a-4930-b981-025117a5986c
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Publication Year
2008
Research Group
Computational Design and Mechanics
Bibliographical Note
DOI 10.1007/s00542-008-0651-y@en
Pages (from-to)
161-168
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