In-package MEMS-based thermal actuators for micro-assembly
Conference Paper
(2005)
Author(s)
VA Henneken (TU Delft - Micro and Nano Engineering)
Marcel Tichem (TU Delft - Micro and Nano Engineering)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Micro and Nano Engineering
To reference this document use:
https://resolver.tudelft.nl/uuid:f2c1d3fd-9833-41d6-9706-44955f48a962
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Publication Year
2005
Research Group
Micro and Nano Engineering
Pages (from-to)
284-287
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