SIMS metingen aan 8 Si/SiGe multilagen
Report
(1998)
Author(s)
E Algra (External organisation)
J Chotard (External organisation)
PFA Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))
Research Group
Old - sect Electronic Materials (NS/EM)
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Publication Year
1998
Research Group
Old - sect Electronic Materials (NS/EM)
Volume number
SIMS 9804
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