Shear mode resonators based on aluminum nitride round membranes with a ring-shaped electrode
Conference Paper
(2013)
Author(s)
AT Tran (TU Delft - Electronic Components, Technology and Materials)
T.S.Y. Moh (TU Delft - Electronic Components, Technology and Materials)
Gregory Pandraud (TU Delft - Electronic Components, Technology and Materials)
H Schellevis (TU Delft - Electronic Components, Technology and Materials)
A.B. Akhnoukh (TU Delft - Electronics)
Pasqualina Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/Transducers.2013.6627039
To reference this document use:
https://resolver.tudelft.nl/uuid:f40cd11c-d07c-4d8e-940e-d80d72a2df9a
More Info
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Publication Year
2013
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1396-1399
ISBN (print)
978-1-4673-5983-2
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