LPCVD amorphous SiCx for freestanding electron transparent windows

Conference paper (2010)

Authors

B. Morana Electronic Components, Technology and Materials -

J.F. Creemer Electronic Components, Technology and Materials -

F. Santagata Electronic Components, Technology and Materials -

C.C Fan External organisation

HTM Pham Old - EWI Sect. ECTM

G. Pandraud Electronic Components, Technology and Materials -

F.D. Tichelaar QN/High Resolution Electron Microscopy

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

More Info

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http://resolver.tudelft.nl/uuid:f54ca274-3d18-4f45-8d16-e446224d3b68

Published Date

2010

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials