Influence of visco-elasticity of low-k dielectrics on thermo-mechanical behavior of dual damascene process
Conference Paper
(2003)
Author(s)
V Gonda (TU Delft - Dynamics of Micro and Nano Systems)
GQ Zhang (External organisation)
J.M.J. den Toonder (External organisation)
J Beijer (External organisation)
L.J. Ernst (TU Delft - Dynamics of Micro and Nano Systems)
Research Group
Dynamics of Micro and Nano Systems
To reference this document use:
https://resolver.tudelft.nl/uuid:f63ee46f-56a7-479f-9bdb-e9b3c07e105c
More Info
expand_more
expand_more
Publication Year
2003
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
288-293
ISBN (print)
0-7803-8168-8
No files available
Metadata only record. There are no files for this record.