PVD Aluminium Nitride as Heat Spreader in Silicon-On-Glass Technology
Conference Paper
(2006)
Author(s)
L. La Spina (TU Delft - Electronic Components, Technology and Materials)
H. Schellevis (TU Delft - Electronic Components, Technology and Materials)
N Nenadovic (TU Delft - Electronic Components, Technology and Materials)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:f6596190-7ad3-48e2-8b29-2bc1da71bc56
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Publication Year
2006
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
365-368
ISBN (print)
1-4244-0116-x
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