On-off control for full-gap positioning of parallel-plate electrostatic MEMS (U-SP-2-I-ICT)
Conference Paper
(2006)
Author(s)
L Mol (TU Delft - Electronic Instrumentation)
RF Wolffenbuttel (TU Delft - Electronic Instrumentation)
LA Rocha (TU Delft - Electronic Instrumentation)
E Cretu (External organisation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:f660e3e2-273f-4724-884e-7cdaad574249
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Publication Year
2006
Research Group
Electronic Instrumentation
Pages (from-to)
1-4
ISBN (print)
0-7918-3790-4
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