Fabrication and characterisation of autoparametric resonators
N. Wansink (TU Delft - Mechanical Engineering)
F. Alijani (TU Delft - Dynamics of Micro and Nano Systems)
D. Farhadi (TU Delft - Mechatronic Systems Design)
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Abstract
Micromechanical resonators, which have become feasible due to advanced manufacturing techniques, have shown several interesting phenomena including mode coupling in a range of applications that span metrology and sensing. Conventional fabrication methods of these resonators have been used throughout the field. However, fabrication of micromechanical resonators by femtosecond laser ablation which could accelerate prototyping, access to three dimensional resonators and reduce clean room use, has received little attention.
In this study, a protocol for fabricating and measuring laser cut micromechanical resonators using computational analysis and experimental techniques has been developed and validated through comparison with previous works by characterising doubly clamped beam resonators. The fabricated prototype is demonstrated to exhibit autoparametric resonance and coupling showcasing the potential of the new approach in engineering and fast prototyping of coupled micromechanical resonators.