Fabrication and characterisation of autoparametric resonators

Master Thesis (2024)
Authors

N. Wansink (TU Delft - Mechanical Engineering)

Supervisors

F. Alijani (TU Delft - Dynamics of Micro and Nano Systems)

D. Farhadi (TU Delft - Mechatronic Systems Design)

Faculty
Mechanical Engineering, Mechanical Engineering
Copyright
© 2024 Nick Wansink
More Info
expand_more
Publication Year
2024
Language
English
Copyright
© 2024 Nick Wansink
Graduation Date
29-02-2024
Awarding Institution
Delft University of Technology
Programme
Mechanical Engineering | Micro and Nano Engineering
Faculty
Mechanical Engineering, Mechanical Engineering
Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Abstract

Micromechanical resonators, which have become feasible due to advanced manufacturing techniques, have shown several interesting phenomena including mode coupling in a range of applications that span metrology and sensing. Conventional fabrication methods of these resonators have been used throughout the field. However, fabrication of micromechanical resonators by femtosecond laser ablation which could accelerate prototyping, access to three dimensional resonators and reduce clean room use, has received little attention.

In this study, a protocol for fabricating and measuring laser cut micromechanical resonators using computational analysis and experimental techniques has been developed and validated through comparison with previous works by characterising doubly clamped beam resonators. The fabricated prototype is demonstrated to exhibit autoparametric resonance and coupling showcasing the potential of the new approach in engineering and fast prototyping of coupled micromechanical resonators.

Files

Thesis_Nick_Wansink.pdf
(pdf | 28.4 Mb)
License info not available