Evaluation of electrical properties of CVD-WGex barriers fabricated by the reduction of WF6 and GeH4
Report
(1996)
Author(s)
PFM Verhoeven (External organisation)
JF Jongste (External organisation)
GCAM Janssen (TU Delft - OLD Metals Processing, Microstructures and Properties)
S Radelaar (TU Delft - OLD Metals Processing, Microstructures and Properties)
M Lerme (External organisation)
O Demolliens (External organisation)
Research Group
OLD Metals Processing, Microstructures and Properties
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Publication Year
1996
Language
English
Research Group
OLD Metals Processing, Microstructures and Properties
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