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Report (1)

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1

Evaluation of electrical properties of CVD-WGex barriers fabricated by the reduction of WF6 and GeH4

Report (1996) - PFM Verhoeven (author) , JF Jongste (author) , G.C.A.M. Janssen (author) , S Radelaar (author) , M Lerme (author) , O Demolliens (author)