A comprehensive model for transient behavior of tapping mode atomic force microscope

Journal Article (2019)
Authors

A. Keyvani Janbahan (TU Delft - Computational Design and Mechanics, TNO)

Selman Tamer (TNO, TU Delft - Computational Design and Mechanics)

J. W. van Wingerden (TU Delft - Team Jan-Willem van Wingerden)

J. F L Goosen (TU Delft - Computational Design and Mechanics)

A Van Keulen (TU Delft - Computational Design and Mechanics)

Research Group
Computational Design and Mechanics
Copyright
© 2019 A. Keyvani Janbahan, M.S. Tamer, J.W. van Wingerden, J.F.L. Goosen, A. van Keulen
To reference this document use:
https://doi.org/10.1007/s11071-019-05079-2
More Info
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Publication Year
2019
Language
English
Copyright
© 2019 A. Keyvani Janbahan, M.S. Tamer, J.W. van Wingerden, J.F.L. Goosen, A. van Keulen
Research Group
Computational Design and Mechanics
Issue number
2
Volume number
97
Pages (from-to)
1601-1617
DOI:
https://doi.org/10.1007/s11071-019-05079-2
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Abstract

Many investigations have focused on steady-state nonlinear dynamics of cantilevers in tapping mode atomic force microscopy (TM-AFM). However, a transient dynamic model—which is essential for a model-based control design—is still missing. In this paper, we derive a mathematical model which covers both the transient and steady-state behavior. The steady-state response of the proposed model has been validated with existing theories. Its transient response, however, which is not covered with existing theories, has been successfully verified with experiments. Besides enabling model-based control design for TM-AFM, this model can explain the high-end aspects of AFM such as speed limitation, image quality, and eventual chaotic behavior.