Local stress analysis in devices by FIB

Kregting, René; Gielen, Sander; van Driel, W; Alkemade, P.F.A.; Miro, H.; Kamminga, J.D.

Local stress analysis in devices by FIB

Conference paper (2010)

Authors

René Kregting External organisation

Sander Gielen External organisation

W van Driel External organisation

P.F.A. Alkemade QN/Kavli Nanolab Delft

H. Miro QN/Kavli Nanolab Delft

J.D. Kamminga OLD Surface and Interface Engineering

Research Group

QN/Kavli Nanolab Delft

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Published Date

2010

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Research Group

QN/Kavli Nanolab Delft

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