Local stress analysis in devices by FIB

Conference Paper (2010)

Authors

R. Kregting (External organisation)

S Gielen (External organisation)

W van Driel (External organisation)

P.F.A. Alkemade (TU Delft - QN/Kavli Nanolab Delft)

H Miro (TU Delft - QN/Kavli Nanolab Delft)

JD Kamminga (OLD Surface and Interface Engineering)

Research Group

QN/Kavli Nanolab Delft

Conf.proc. > 3 pag Conference contrib. refereed

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Publication Year

2010

Research Group

QN/Kavli Nanolab Delft

Pages (from-to)

1-5

ISBN (print)

978-1-4244-7026-6

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