Local stress analysis in devices by FIB

Conference paper (2010)

Authors

R Kregting External organisation
Sander Gielen External organisation
W van Driel External organisation
P.F.A. Alkemade QN/Kavli Nanolab Delft - AS
H. Miro QN/Kavli Nanolab Delft - AS
J.D. Kamminga OLD Surface and Interface Engineering
Research Group
QN/Kavli Nanolab Delft (AS) (TU Delft)
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Published Date

2010

Language

Undefined/Unknown

Reuse Rights

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Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Research Group

QN/Kavli Nanolab Delft