Molecular Dynamics Simulations of Growth and Low-Energy Ion Polishing of Thin Molybdenum Films for EUV Multilayer Mirrors.
Conference Paper
(2000)
Author(s)
P Klaver (External organisation)
W Goedheer (External organisation)
F Bijkerk (External organisation)
B.J. Thijsse (TU Delft - OLD Virtual Materials and Mechanics)
Research Group
OLD Virtual Materials and Mechanics
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Publication Year
2000
Research Group
OLD Virtual Materials and Mechanics
Bibliographical Note
ISSN 0272-9172@en
Pages (from-to)
305-312
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