Molecular Dynamics Simulations of Growth and Low-Energy Ion Polishing of Thin Molybdenum Films for EUV Multilayer Mirrors.

Conference Paper (2000)
Author(s)

P Klaver (External organisation)

W Goedheer (External organisation)

F Bijkerk (External organisation)

B.J. Thijsse (TU Delft - OLD Virtual Materials and Mechanics)

Research Group
OLD Virtual Materials and Mechanics
More Info
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Publication Year
2000
Research Group
OLD Virtual Materials and Mechanics
Bibliographical Note
ISSN 0272-9172@en
Pages (from-to)
305-312

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