Molecular Dynamics Simulations of Growth and Low-Energy Ion Polishing of Thin Molybdenum Films for EUV Multilayer Mirrors.

Conference paper (2000)

Authors

P Klaver External organisation
W Goedheer External organisation
F Bijkerk External organisation
B.J. Thijsse OLD Virtual Materials and Mechanics
Research Group
OLD Virtual Materials and Mechanics
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Published Date

2000

Language

Undefined/Unknown

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Research Group

OLD Virtual Materials and Mechanics