PK

P Klaver

3 records found

Molecular Dynamics Simulations of Growth and Low-Energy Ion Polishing of Thin Molybdenum Films for EUV Multilayer Mirrors.

Defect production during ion-assisted deposition of molybdenum films studied by molecular dynamics.
Journal article (1999) - P Klaver (author), BJ Thijsse (author)

Atomic-scale effects of sub-keV ions during growth and subsequent ion-beam analysis of molybdenum thin films.