Design of in-package MST-based actuators for micro-assembly
Conference Paper
(2004)
Author(s)
VA Henneken (TU Delft - Micro and Nano Engineering)
S van den Bedem (External organisation)
M. Tichem (TU Delft - Micro and Nano Engineering)
B Karpuschewski (TU Delft - Micro and Nano Engineering)
Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Micro and Nano Engineering
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https://resolver.tudelft.nl/uuid:f91cc3d4-86e9-4e9c-a5bf-924362c85d4d
More Info
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Publication Year
2004
Research Group
Micro and Nano Engineering
Bibliographical Note
ed. is niet bekend@en
Pages (from-to)
747-752
ISBN (print)
90-73461-43X
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