Defecten in molybdeen-lagen en de effecten van ionenbundel-assistentie tijdens het opdampen.
Journal Article
(1998)
Author(s)
BA Korevaar (TU Delft - Electronic Components, Technology and Materials)
CJ Pols (External organisation)
J van der Kuur (TU Delft - OLD Virtual Materials and Mechanics)
Barend Thijsse (TU Delft - OLD Virtual Materials and Mechanics)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:f995aafb-d843-4e9c-acab-234c452bf577
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Publication Year
1998
Research Group
Electronic Components, Technology and Materials
Issue number
1
Volume number
36
Pages (from-to)
3-10
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