Nanometer-scale height measurements in micromachined picoliter vials based on interference fringe analysis

Conference paper (2000)

Authors

LR van den Doel ImPhys/Quantitative Imaging
L.J. van Vliet ImPhys/Quantitative Imaging
KT Hjelt ImPhys/Quantitative Imaging
MJ Vellekoop Electronic Instrumentation - EEMCS
F Gromball External organisation
JG Korvink External organisation
I.T. Young ImPhys/Quantitative Imaging
Research Group
ImPhys/Quantitative Imaging
More Info
expand_more

Published Date

2000

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

ImPhys/Quantitative Imaging