Nanometer-scale height measurements in micromachined picoliter vials based on interference fringe analysis
Conference Paper
(2000)
Author(s)
LR van den Doel (TU Delft - ImPhys/Quantitative Imaging)
LJ van Vliet (TU Delft - ImPhys/Quantitative Imaging)
KT Hjelt (TU Delft - ImPhys/Quantitative Imaging)
MJ Vellekoop (TU Delft - Electronic Instrumentation)
F Gromball (External organisation)
JG Korvink (External organisation)
I.T. Young (TU Delft - ImPhys/Quantitative Imaging)
Research Group
ImPhys/Quantitative Imaging
To reference this document use:
https://resolver.tudelft.nl/uuid:f9bf7603-9776-4197-b329-144755a63595
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Publication Year
2000
Research Group
ImPhys/Quantitative Imaging
Pages (from-to)
57-62
ISBN (print)
1051-4651
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