Capacitance-to-digital converter for accurate displacement measurement in the sub-nanometre range

Conference Paper (2014)
Author(s)

R Nojdelov (External organisation)

Stoyan Nihtianova (TU Delft - Electronic Instrumentation)

A Yacoot (External organisation)

D Voigt (External organisation)

Research Group
Electronic Instrumentation
More Info
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Publication Year
2014
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
347-352
ISBN (print)
978-929900732-7

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