Probe current, probe size, and the practical brightness for probe forming systems

Journal article (2008)

Authors

MS Bronsgeest ImPhys/Charged Particle Optics
JE Barth ImPhys/Charged Particle Optics
LW Swanson External organisation
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

2008

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics