Probe current, probe size, and the practical brightness for probe forming systems
Journal Article
(2008)
Author(s)
MS Bronsgeest (TU Delft - ImPhys/Charged Particle Optics)
JE Barth (TU Delft - ImPhys/Charged Particle Optics)
LW Swanson (External organisation)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:fceae217-7eb4-4e33-a523-4ff9db1bfaa1
More Info
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Publication Year
2008
Research Group
ImPhys/Charged Particle Optics
Issue number
3
Volume number
26
Pages (from-to)
949-955
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